Loadport Overhaul&Repair

TDK TAS300 Loadport

Type : E3, E4, E4A, F1, G1A, J1

LAM, KLA, Onto, AMAT, Hitachi, Mattson, Ebara, TEL, Axcelis

Shinko 12F25 Selop sereis

   Type : Selop 6, Selop 7 

   LAM, KLA, Onto, TEL, AMAT

Brooks Fixload series

Type : Fixload 6M, Fixload V6

LAM, Novellus, Axcelis, Etc.

Brooks VisionLPM

Type : VisionLPM, VisionLeap

LAM, Onto, Axcelis, Etc.

Asyst ISOport

KLA, Onto, AMAT(CMP) Kokusai, Mattson, Ebara, TEL

Asyst Falcon

Mattson, Ebara, TEL(FSI)